Optomechanical Design of Collimated UV Source Module
نویسندگان
چکیده
This paper presents a UV (ultraviolet) lithography apparatus that utilizes an array composed of UV-LED (light emitting diode) collimation modules as a micro-patterning light source for PCB (printed circuit board) fabrication. To provide a uniform (non-uniformity > 90%) and collimated (FWHM < ±2°) exposure area, hexagonal light source modules are disposed in a hexagonal array. Each module is consisted of a LED chip, a biconvex lens to enhance UV collimation and uniformity, and a hexagonal sidewall to absorb the side propagation UV light. The whole exposure system is thus composed a layer of heat sink (made of a copper cooling plate), a plurality of UV-LEDs disposed in an array, a baffle wall extending between UV-LED and the respective plurality of collimating lenses.
منابع مشابه
Electrical, thermal and optomechanical packaging of large 2D optoelectronic device arrays for free-space optical interconnects
Innovative approaches to the design of a high-performance package module accommodating a 32× 32 array of surface-active devices indium bump bonded to a 8× 8 mm2 VLSI chip are presented. Electrical, thermal and optomechanical design considerations are discussed and experimental performance results of a prototype implementation are described. The package module supports 139 impedance-controlled s...
متن کاملCharacterization of porosity in vapor-deposited amorphous solid water from methane adsorption.
We have characterized the porosity of vapor-deposited amorphous solid water (ice) films deposited at 30-40 K using several complementary techniques such as quartz crystal microgravimetry, UV-visible interferometry, and infrared reflectance spectrometry in tandem with methane adsorption. The results, inferred from the gas adsorption isotherms, reveal the existence of microporosity in all vapor-d...
متن کاملValidation of the TUV module in CWRF using USDA UV-B network observations
Ultraviolet (UV) radiation is the source energy for tropospheric photolysis processes, while harmful for living organism of the earth. It is thus necessary to incorporate UV radiation for an integrated earth modeling system to predict interactions between climate, chemistry and ecosystem processed. The widely-used NCAR TUV (Tropospheric Ultraviolet and Visible) radiation model has been coupled ...
متن کاملHigh luminance hybrid light guide plate for backlight module application.
We introduce a hybrid backlight module, which consists of a hybrid light guide plate (HLGP) and a brightness enhancement film (BEF). The HLGP comprises functions of a conventional light guide plate, a reflector, and a BEF. The HLGP allows one-dimensional rays to be collimated. We add a BEF above the HLGP, and let the crossed-dimension rays to be collimated. Comparing with the conventional edge-...
متن کاملA low-cost low-maintenance ultraviolet lithography light source based on light-emitting diodes.
A source of collimated ultraviolet (UV) light is a central piece of equipment needed for lithographic fabrication of microfluidic devices. Conventional UV light sources based on high-pressure mercury lamps require considerable maintenance and provide broad-band illumination with intensity that often changes with time. Here we present a source of narrow-band UV light based on an array of nine 36...
متن کامل